篮球竞彩什么软件好 :CIMSՓĵ

򾺲 www.fasfz.com  

΢CеԪ̓xMչ*

ע⣺ՓڡWܹ(1999,7(1):1015)s־l
ʹՈעՓij̎

BWCеϵ

LWܙCео

ժҪ ΢CеԪ΢Cеxmڴaгɱ܃we΢Сɶȸߵcʮ_lЈUȡ˾޴MչչFõǰ

һǰ

΢ӼgİlչͨӍϢ̎akԄӻI򎧁˾޴Mʹʽ˼SʽĮaIYl˾޴׃Ϣr

Ӽglչͬrһµļg΢CеgȻQ΢CеlչѸо޴İlչ͑ǰSƌW҈ɞ^΢Ӽg֮һƄѸMĸԼg

΢CеȫQ΢әCеϵy΢Ӽg΢ӹgAһ¼gʮ΢Cеgĸ_ʼѿһЩЄҊĿƌW_ʼ̽ù΢ӹͿO댢΢СĎ׺οgĶγɸ߶ԄӻܻԴar΢әCеϵyʮĩ΢Cеȼgij첢ЈICˇo΢늙CƳɹ־΢CеgѽlչһTdWڿƌW҂Ƅ΢Cеgܵ‡ձȰl_ҵҕͶ˴ʮg΢Cеgȡ˱³ɹ΢Cеg͸Ia˾޴ĽЧչFõǰ

΢CеԪ

΢CеԪȿ骚ں^ęCϵyֿ΢CеϵyĆԪ΢Cеֹо_lҪ

΢CеоҪڹ@cõęCеܺcICˇļPƳɹƷǽYεĂ艺@N܃ɱЈLʮѸ95a5ǧfAӋ2005a_1|2ǧf[1]1995ȫЈ60|Ԫмs4֮1΢Cе΢CеHʮvlչѸF΢Cеgď

΢CеЈԷdzHMһyr،ڸIõĶ_ٸV韵dЈHSĹ˾RosemoutAnalog DevicesMotorolaзeO΢CеЈlչӋ

һ΢CеԪ

΢CеăڴarɱaƷ- r@ڂyĿǰЏVЈđI

1๦ܽ^

ʯ?ǶԻҪ?ʹ܇̱횸MȼĽ܇λϵг܇β|?RķѼȄ\?@NϵyPIԪ๦ܽ^1995@Naǧf

2tÉ

ʹ΢CеǰyѪõǿɿ^͵ͨ@Щʹǰ횷͘˶yѪM^

܇ö๦ܹ艺Ƴɹ˂ɹ_ltÉ@NtÂʹǰ˶ͷʹMúܵڇصļ\ίKgtеõV1995aһǧ˰f[23]

3ٶȂ

ʮٶȂɌоD댍H܇܇к̈́x܇ȫጷſϵy95af[4]^ȥĶʮmȻ܇܇Ĕ75%܇ʅsp50%@c΢CеٶȂ܇еđкܴPϵ

ЈAy

ʮǰ΢CеHй艺^ЈٶȂڎĕrgЮa202ǧfS΢CеҲ̘IЈrֵ_ʮ|ԪFǂ΢CеЈ߀dzСAyڽʮǂ΢Cе@L

^Јǰ΢CеУ

1

΢CеMһL܇ܻWjݔȷ[5]܇đðȼ߉lәCĶ๦܉ӄx܇

2TԂ

TԂlչʮѸٶӋDӋ݃xҪ܇Կƺ{Ƽ̓MFȷ܇ȫጷŞĿ˵ļٶȂѽ_lɹߴH3mm3mm̞5gAӋrÿ15Ԫ[6]

TԂܑTԌĺ܇wCͺ{Ϳ

3w

w牺yƷ^LĿǰ΢Cеwڲضȷ^խƷ^Сcw߀ܺܺÝMy̘IIҪ[7]

4A

sܛӰ༼gϢAM˸ܶȴAgо헸ܶȴAg_l֮΢CеgI̘IǰĴAgо

1оƬϵŷ늙CӲP^ԌF0.1mܶλAܶȿ_100GB/in2 [7]

2IBM_lһNԴAPxg΢CеgP⡱ڡrԱPγɰxrcڵijƬCxķһԓьFAܶ_20GB/in2 [8]

5@ʾоƬ

݃x_l΢DR@ʾоƬgʮFѽ_ʼaNоƬ[9]?ᅜOyȹ˾nN`H?΢Cе@ʾоƬKFЈھ޴@ʾЈռһ~

6΢CеͨӍ

_lеĹw΢Cе{ϣF񌍕rӰͨӍϣõѸٰlչ [10]

7CMOS 늶т

/֧εnͶྦྷ/pͶྦྷtк늹ʂԪCMOS ICˇ^ͨ^CMOSw踯gˇF͵814΢׵IJLÁOygĮmKß늶сzy[11]AӋԓԪI܊϶ЏV韵đǰ

8CMOS

É՚ӰƳɜywCMOS ĿǰƵÁy102106Pa՚≺[12]

9CMOS ͨLͿ՚{HVAC๦܂

ͨLͿ՚{횜yԇضͿ՚ĝ늶ቺк͜yȵָCMOSgһw㘋HVAC[13]@N|hĿаl]Ҫ

΢Cеx

΢Cеg܉^ͳɱߴ΢СęCеYҿԌһwڜyԇxȷF˾޴ăԽ

1΢CеӾx

ڼLë܃ɶ˼ֱ늉עxӌҺwlӾ\ĘƷעëһͬļFԲͬٶ\Ķγɰ|ķֲëܵĂ÷侀ɹԜyԇӵĽMijһMDNAĽM

΢CеӾxȂyӾxкܴԽHrߴСHyӾxߴ10֮һٶȿҲ10ҜyԇYӜʴ_[14]

2΢Cе|Vx

ӾxÁԇӵķӽM|VxÁԇӵԭӽMɵ|VxȌԇӚ⻯Ȼx늈ʹxӸ\ڴňЌͬ|xӷxͬ\܉ͬ̽yzyɷԭӽM΢Cе@N|Vx_l֮AӋԌߴsʹС[15]

3΢CеӋ

ͨ^ҸҺwעb͸ҺwԇעrҸҺԇ͸ҺγɺܼһlҺҺdzԏԇ܂y΂ΠߴWMнyӋWо@tWоdzF@NxʮְF΢Cеxе΢Yʮֱ΢CеӋÁ_H0.1%Ѫ[16]

4΢CеȾɫw朳ɷx

FмgПoydzٵDNAĽYֻͨ^DNAȾɫwʹ֮ܜyüӟrDNAp|ӵڽֽɃɗlsrmķԇԇcÿһ໥MγɃɗlpDNA؏^ʹDNAӴֳ[17]

΢Cеʽxڎ׷犃DNAĘƷȂyx510ԹsrFķԇStDNAyԇɱ܃΢Cеʽx^Ј

5΢Cеؽ̽yx

΢CеƳꖘOܽʽؽ̽yxؽλxzyƷؽٺ΢Cеߴ^Сıyʽؽ̽yxڬFOyؽȾ[18]

6΢CеѪҺyԇx

΢CеﻯWAѪҺֳ͜yԇxԿٜyԇѪҺеCO2K+Na+C1-pHֵȶNָ[19]@NѪҺx_lɹAʾWxMһ

YՓ

̶̵ʮrg΢CеQԭо_lxѽe˱ɹγһI򶼌lشӰ푵SʵŒWĿǰ΢CеFˏڂЈռ_1/4_س܇ȫጷſϵyȸֵ߽rֵͮaƷ΢Cе݃xͻWȷоɹ΢CеڱI򌢰l]޴a޴Ľrֵ޴M

΢Cеx_lоɹѽ_lƷNɱıyʽ̓xyԇٶȿyԇYӾ@ʹԽԽ˵õ|tЗl¸ߌӴεĿƌWо

c΢ӋC΢Cеăڴaăr񃞄Fȡ̘IɹҪЩо޴ЈĿWSN?ʽ?MϳɷNăxϵyF΢CеaƷĶӻ

īI

  1. J. Bryzek, Impact of MEMS technology on society, Sensors and Actuators A 56 (1996), 1~9
  2. J. Bryzek, New generation of disposable blood pressure sensors, Proc. Sensors Expro, Detroit, MI, USA. 1987
  3. J. Bryzek, etc., Silicon sensors and micro structures in health care industry, Proc. Sensors, Expro,
  4. W. Kuchuel, A surface machined silicon accelerometer with on-chip detection circuitry, Sensory and Actuators, A, 45(1994),7-16
  5. BIS Strategic Decision: Automotive components forecast II: Sensors market study, 1993.
  6. K.H.L. Chan, etc., An integrated force-balanced capacitive accelerometer for low-g application, Sensors and Actuator, A, 52(1996), p.472
  7. M. Zdeblick, Micro-fabricated thermop-neumatic actuator for use in fluid regulation systems and other integrated elector-fluidic circuits, ARPA Report, Redwood Micro-system, Menlo Park, CA, 1995.
  8. J.Mamin, Compact, high capacity data storage wring proximal probes, ARPA report, IBM Almaden Center, San Jose. CA.. 1995
  9. J. B. Sampesll, The digital micro-mirror device and its application to project displays, Tech Digest, 7th Int. Conf. Solid-State Sensors and Actuators(Transducerst3), Yokohama, Japan, 7-10 June, 1993, p. 24
  10. F. Hiroyuki, Future of actuators and micro-systems, Sensors and Actuaries A 56(1996), p.105
  11. D. Jaeggi, etc., Overall system analysis of a CMOS thermal converter, Tech Digest, 9th Int. Conf. Solid-State Sensors and Actuators/Eurosensors IX, Stockholm, Sweden, 25-29 June,, 1005, Vol.2, p. 112
  12. O. Paul and H. Baltes, Novel fully CMOS compatible vacuum sensor, Sensors and Actuators A, 46-47(1995) p. 143
  13. P. Malcovati, Combined air humidity and flow CMOS microsensor with on-chi sigma-delta A/D interfacem, Tech. Digest, Symp. VLSI circuits, Kyoto, Japan, 8-10 June, 1995, p. 45.
  14. D. J. Harriso, Chemical analysis and electorphoresis systems integrated on glass and silicon chips, Proc. IEEE Solid-State Sensor and Actuator Workshop, Hilton Head, SC, USA, June 1992, p.110.
  15. H.C. Nathaanson, Novel functionality using micro-gaseous devices, Proc. IEEE Conf. MEMS, Amsterdam, Netherlands, Jan. 1995, p.72
  16. D. Sobek, etc. Micro-fabricated fused silica flow chambers for flow cytometry, Proc. IEEE Solid-State Sensor and Actuator Workshop, Hilton Head, SC. USA, June 1994, p. 260
  17. M. A. Northrop, etc, DNA amplification in a micro-fabricated reaction chamber, Proc,. 7th Int. Conf. Solid-State Sensor and(Transducer93), Yokohama, Japan, 7-10,June, 1993, p. 924
  18. R.J. Reay, etc, Micro-fabricated eletro-chemical analysis system for heavy metal detection , Tech. Digest, 8th Int. Conf. Solid-State Sensors and Actuators(Transducers95)/Euro-sensors IX, Stockholm, Sweden, 25-29 June, 1995, Vol. 2, p.932
  19. G. Yee, etc. Proc. Solid-State Sensor and Actuator Workshop, Hilton Head, SC, USA, June, 1996

New Progress of MEMS Component and Instrument

Dalian University of Science and Technology Shao Pei-ge
Changchun Institute of and Optics and Fine Mechanics Wang Li-ding Ren Yan-tong

Abstract MEMS component and Instrument are suitable for batch manufacture and have the advantage of low price, high reliability, smaller volume and large-scale integration. In this decade a great progress has been made in the research, development and marketing of this field, which suggests a bright future.

*863Ӌ|ʡʿӻʿYĿ

ߺ:

, , 1964, 1996ڹIIW@ʿWλFBWCеϵʿѰlWgՓʮƪ

,ЇƌWԺԺʿ

 


վ䛵ıߵՓģ

1abrication of enclosed nanochannels in poly(methylmethacrylate) using proton beam writing and thermal bonding

2vʽ΢늙Cо

3Polymer micro piezo valve with a small dead volume

4Dosing system for the nanolitre range,fabricated with the AMANDA process

PՓՈcվ<<<վȫ>>>

gӭӑՓlՓļоIĿ
(Ոڰlԕrژ}ʹcuՓĵ}Ŀо@ӷҞg[)

| CIMSՓ | й | ̓M | | Փ | Ŀ_l | WgYԴ | վȫ | MՓľWվȫ |

line.gif (4535 ֹ)

˸õĞҷgӭӱվͶƱ{

򾺲 Ոc

վ򾺲 gӭL

ע⣺վδSDd

All rights reserved, all contents copyright 2000-2019
վ20003¿WL