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ע⣺ՓڡЇCе̡(2001,12(6):704-706)l
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(BWCеϵB116024)

ժҪ ˿vʽ΢늙CәC늙Cӱ۵OӋֱ5mmĿvʽ΢늙CMˌо

PI~ vʽ ΢늙C әCOӋҎt

Research on Micro Piezoelectric Motor Driven by Longitudinal- Transverse Vibration Cantilevers

Shao Peige  Wang Liding

(Dalian Uni. of Technology Mechanical Engineering, Dalian, China, 116024)

Abstract: The driving mechanism of a micro motor is analyzed and the design method of driving is presented. A f5mm of piezoelectric micro motor driven by longitudinal-transverse vibration cantilevers is developed and experimental researches are carried out on it.
Key Words:
longitudinal- transverse vibration piezoelectric motor, Driving Mechanism, Design role

 

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    ΢늙Cоʼ ,1 992 ,Flynn [1 ]ƳDֱ 1 . 5mmıĤʽ΢늙Cģ ,S ,ձҲډ΢늙C_չһЩ΢늙COӋҪʮֿ ,̎ԇоA
    2 0o 90_ʼMЉ΢늙Cо ,1 993ЇƌWԺLWܙCеоƳɹDֱ 3 mmв΢늙Cģ[2 ],S ,ЇƌWԺϺұоƳɹ͉΢늙C[3 ] 1 993ԁ ,LCв΢늙CәCͿvʽv΢늙Cȷ_չо
    mȻ ,΢늙CоȡһMչ ,@N늙CęC^s ,оĚvʷ߀ܶ ,߀S}дMһоPߌһNY ,΢ͻĉ΢늙C --vʽv΢늙CәCM˷Դ˞A ,OӋһ_ 5mmĉ΢늙C ,Mˌо

1 vʽ΢늙CәC

 

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 [1] A.M.Flynn,et al Piezoelectric Micromotor for microrobots, Ultrasonic Symposium, U.S.A,   1990,1163-1172

[2] •΢늙CәCоCе̌W1995471-76

[3] ZHANG Jian,SHEN Dexin,WANG Weiyuan. Me-mbrane Micromotors Based on Piezoelectric Proper-ties of PVDF Polymer Films. MEMS-ASME,DSC,1 996,59:3 87 3 92

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ո :19990211
*Ŀ : 863߼gоlչӋYĿ (863-512-96-08);ȻƌWYĿ (5987500 9);|ʡʿӻYĿ (971050)

 ߺ :
, ,1 96 4BW (|ʡB1 1 6 0 2 4)CеϵvʿоˆT΢CϵyоlՓ 1 0ƪ
, ,1 935BWCеϵ΢CоЇƌWԺԺʿ


1Fabrication of enclosed nanochannels in poly(methylmethacrylate) using proton beam writing and thermal bonding

2΢CеԪ̓xMչ

3Polymer micro piezo valve with a small dead volume

4Dosing system for the nanolitre range,fabricated with the AMANDA process

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